scia Systems was founded 2013 and is located in Chemnitz, Germany. The company manufactures advanced ion beam and plasma processing equipment for the production of microelectronics, MEMS and precision optical components, in both high volume production as well as R&D applications. scia Systems provides highly reliable tools together with outstanding technology support. The systems accommodate all standard wafer sizes and may be customized to handle samples in a wide range of sizes. The tools are flexible and modular in design, allowing several vacuum process chambers to be combined into cluster or in-line solutions, according to customer-specific requirements.
Ion Beam Etching (IBE) Systems:
for full surface etching of substrates up to 150 mm
for full surface etching of wafers up to 200 mm
for full surface etching of wafers up to 300 mm
Ion Beam Trimming (IBT) Systems:
for localized trimming, polishing, and planarization for wafers up to 200mm
for polishing error correction on substrates up to 1500mm
Magnetron Sputtering Systems:
for wafer coatings of up to 200mm
for uniform multilayer deposition of wafers up to 300mm diameter
for multilayer coatings of large substrates up to 680mm
for multilayer coatings of substrates up to 1500mm
Ion Beam Sputtering (IBS) Systems:
for high quality multilayer deposition of substrates up to 200mm
for large area multilayer deposition of substrates up to
500mm x 300mm
for high precision optical coatings of substrates up to
300mm diameter
PECVD/RIE Systems:
PECVD system for 3D coatings in batches
PECVD or RIE system for large area coating or etching of substrates over 300mm x 200mm
PECVD or RIE system for large area coating or etching of substrates over 750mm x 750mm
Dry-Cleaning Systems:
for high-quality cleaning and qualification of substrates up to 800mm dia. & 500mm height
for high-quality cleaning and qualification of substrates up to 3m dia. and 3.4m length
Electron Beam Evaporation Systems:
for glancing angle deposition for precise nanostructures on wafers up to 200mm
Custom-Made Systems:
Customized system for your needs in various configurations.
for shaping and coating of high-quality razor blade tips