PECVD system for 3D coatings in batches
PECVD or RIE system for large area coating or etching of substrates over 300mm x 200mm
PECVD or RIE system for large area coating or etching of substrates over 750mm x 750mm
PECVD/RIE Systems:
PECVD system for 3D coatings in batches
PECVD or RIE system for large area coating or etching of substrates over 300mm x 200mm
PECVD or RIE system for large area coating or etching of substrates over 750mm x 750mm