![](https://aardtechnology.com/wp-content/uploads/2022/04/scia-Batch-350.jpg)
PECVD system for 3D coatings in batches
![](https://aardtechnology.com/wp-content/uploads/2022/04/scia-Cube-300-verkleidet.jpg)
PECVD or RIE system for large area coating or etching of substrates over 300mm x 200mm
![](https://aardtechnology.com/wp-content/uploads/2022/04/scia-Cube-750.jpg)
PECVD or RIE system for large area coating or etching of substrates over 750mm x 750mm
PECVD system for 3D coatings in batches
PECVD or RIE system for large area coating or etching of substrates over 300mm x 200mm
PECVD or RIE system for large area coating or etching of substrates over 750mm x 750mm