![](https://aardtechnology.com/wp-content/uploads/2022/04/scia-Trim-200-mit-Handler-Verkleidung-1-1024x683.png)
for localized trimming, polishing, and planarization for wafers up to 200mm
![](https://aardtechnology.com/wp-content/uploads/2022/04/scia-Finish-1500-mit-Transportwagen-1024x683.png)
for polishing error correction on substrates up to 1500mm
for localized trimming, polishing, and planarization for wafers up to 200mm
for polishing error correction on substrates up to 1500mm