mueggue logoMUEGGE GmbH is the top international supplier in the field of industrial microwave technology. Its portfolio includes microwave generators and components, including the corresponding power supply technology for various applications, such as industrial microwave heating, and especially plasma technology. The microwave systems produced by  MUEGGE are used  to generate plasma for industrial, semiconductor and flat panel applications.

MUEGGE’s services range from the development of process engineering and plant engineering systems to construction, assembly, plant start-ups and comprehensive customer support. Its key products include both components and plasma sources based on industrial microwave plasma, such as a high-performance remote plasma source to create radicals (Rapid Reactive Radicals Technology, R3T) for use in the semiconductor industry.


Muegge GmbH Products

STP 2020

Stripping Tool optimized for the removal of thick photo resist layers like SU-8.


website:  Muegge GmbH

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