for wafer coatings of up to 200mm
for uniform multilayer deposition of wafers up to 300mm diameter
for multilayer coatings of large substrates up to 680mm
for multilayer coatings of substrates up to 1500mm
for wafer coatings of up to 200mm
for uniform multilayer deposition of wafers up to 300mm diameter
for multilayer coatings of large substrates up to 680mm
for multilayer coatings of substrates up to 1500mm