for high quality multilayer deposition of substrates up to 200mm
for large area multilayer deposition of substrates up to
500mm x 300mm
for high precision optical coatings of substrates up to
300mm diameter
for high quality multilayer deposition of substrates up to 200mm
for large area multilayer deposition of substrates up to
500mm x 300mm
for high precision optical coatings of substrates up to
300mm diameter