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scia Systems GmbH
Ion Beam Etching (IBE)
scia Mill 150 / 200 / 300
Ion Beam Trimming (IBT)
scia Trim 200 / 300
scia Finish 1500
Magnetron Sputtering
scia Magna 200
scia Multi 300-1500
Ion Beam Sputtering (IBS)
scia Coat 200 / 500
scia Opto 300
PECVD / RIE
scia Batch 350
scia Cube 300 / 750
Electron Beam Evaporation
scia Eva 200
Dry Cleaning
scia Clean 800 / 1000 / 1500 / 3000
Customized Systems
Custom-Made Systems
scia Inline 400
MUEGGE GmbH
STP2020 – Gentle Resist Strip
Applications
Technologies
Photonics – Ion Beam Solutions
Wafer Planarization
Ion Beam Etching (IBE) of Piezoelectric Devices
CAIBE of III-V Semiconductor Materials
Dual Ion Beam Sputtering (DIBS) of Metal-Oxides with Precise Stoichiometric Control
About Us
Contact Us
Home
Products
scia Systems GmbH
Ion Beam Etching (IBE)
scia Mill 150 / 200 / 300
Ion Beam Trimming (IBT)
scia Trim 200 / 300
scia Finish 1500
Magnetron Sputtering
scia Magna 200
scia Multi 300-1500
Ion Beam Sputtering (IBS)
scia Coat 200 / 500
scia Opto 300
PECVD / RIE
scia Batch 350
scia Cube 300 / 750
Electron Beam Evaporation
scia Eva 200
Dry Cleaning
scia Clean 800 / 1000 / 1500 / 3000
Customized Systems
Custom-Made Systems
scia Inline 400
MUEGGE GmbH
STP2020 – Gentle Resist Strip
Applications
Technologies
Photonics – Ion Beam Solutions
Wafer Planarization
Ion Beam Etching (IBE) of Piezoelectric Devices
CAIBE of III-V Semiconductor Materials
Dual Ion Beam Sputtering (DIBS) of Metal-Oxides with Precise Stoichiometric Control
About Us
Contact Us
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OFC 2025
April 1
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April 3
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ICSCRM 2024
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Start:
April 1
End:
April 3
