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scia Systems GmbH
Ion Beam Etching (IBE)
scia Mill 150 / 200 / 300
Ion Beam Trimming (IBT)
scia Trim 200 / 300
scia Finish 1500
Magnetron Sputtering
scia Magna 200
scia Multi 300-1500
Ion Beam Sputtering (IBS)
scia Coat 200 / 500
scia Opto 300
PECVD / RIE
scia Batch 350
scia Cube 300 / 750
Electron Beam Evaporation
scia Eva 200
Dry Cleaning
scia Clean 800 / 1000 / 1500 / 3000
Customized Systems
Custom-Made Systems
scia Inline 400
MUEGGE GmbH
STP2020 – Gentle Resist Strip
Applications
Technologies
Photonics – Ion Beam Solutions
Wafer Planarization
Ion Beam Etching (IBE) of Piezoelectric Devices
CAIBE of III-V Semiconductor Materials
Dual Ion Beam Sputtering (DIBS) of Metal-Oxides with Precise Stoichiometric Control
About Us
Contact Us
Home
Products
scia Systems GmbH
Ion Beam Etching (IBE)
scia Mill 150 / 200 / 300
Ion Beam Trimming (IBT)
scia Trim 200 / 300
scia Finish 1500
Magnetron Sputtering
scia Magna 200
scia Multi 300-1500
Ion Beam Sputtering (IBS)
scia Coat 200 / 500
scia Opto 300
PECVD / RIE
scia Batch 350
scia Cube 300 / 750
Electron Beam Evaporation
scia Eva 200
Dry Cleaning
scia Clean 800 / 1000 / 1500 / 3000
Customized Systems
Custom-Made Systems
scia Inline 400
MUEGGE GmbH
STP2020 – Gentle Resist Strip
Applications
Technologies
Photonics – Ion Beam Solutions
Wafer Planarization
Ion Beam Etching (IBE) of Piezoelectric Devices
CAIBE of III-V Semiconductor Materials
Dual Ion Beam Sputtering (DIBS) of Metal-Oxides with Precise Stoichiometric Control
About Us
Contact Us
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« All Events
SemiCon West 2024
July 9
-
July 11
«
UGIM 2024
SPIE Optics + Photonics 2024
»
Contact us to set up a meeting!
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Details
Start:
July 9
End:
July 11
Venue
Moscone Center
747 Howard St
San Francisco
,
CA
94103
United States
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