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  • Products
    • scia Systems GmbH
      • Ion Beam Etching (IBE)
        • scia Mill 150 / 200 / 300
      • Ion Beam Trimming (IBT)
        • scia Trim 200 / 300
        • scia Finish 1500
      • Magnetron Sputtering
        • scia Magna 200
        • scia Multi 300-1500
      • Ion Beam Sputtering (IBS)
        • scia Coat 200 / 500
        • scia Opto 300
      • PECVD / RIE
        • scia Batch 350
        • scia Cube 300 / 750
      • Electron Beam Evaporation
        • scia Eva 200
      • Dry Cleaning
        • scia Clean 800 / 1000 / 1500 / 3000
      • Customized Systems
        • Custom-Made Systems
        • scia Inline 400
    • MUEGGE GmbH
      • STP2020 – Gentle Resist Strip
  • Applications
    • Technologies
    • Photonics – Ion Beam Solutions
    • Wafer Planarization
    • Ion Beam Etching (IBE) of Piezoelectric Devices
    • CAIBE of III-V Semiconductor Materials
    • Dual Ion Beam Sputtering (DIBS) of Metal-Oxides with Precise Stoichiometric Control
  • About Us
  • Contact Us
  • Home
  • Products
    • scia Systems GmbH
      • Ion Beam Etching (IBE)
        • scia Mill 150 / 200 / 300
      • Ion Beam Trimming (IBT)
        • scia Trim 200 / 300
        • scia Finish 1500
      • Magnetron Sputtering
        • scia Magna 200
        • scia Multi 300-1500
      • Ion Beam Sputtering (IBS)
        • scia Coat 200 / 500
        • scia Opto 300
      • PECVD / RIE
        • scia Batch 350
        • scia Cube 300 / 750
      • Electron Beam Evaporation
        • scia Eva 200
      • Dry Cleaning
        • scia Clean 800 / 1000 / 1500 / 3000
      • Customized Systems
        • Custom-Made Systems
        • scia Inline 400
    • MUEGGE GmbH
      • STP2020 – Gentle Resist Strip
  • Applications
    • Technologies
    • Photonics – Ion Beam Solutions
    • Wafer Planarization
    • Ion Beam Etching (IBE) of Piezoelectric Devices
    • CAIBE of III-V Semiconductor Materials
    • Dual Ion Beam Sputtering (DIBS) of Metal-Oxides with Precise Stoichiometric Control
  • About Us
  • Contact Us

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